The purpose of this paper is to investigate the design methodology, test results, and potential applications of a high resolution and low thermal drift calibrated digital inclinometer based on a MEMS capacitive sensor. The inclinometer provides ±10° of measurement range in a rotational plane that is perpendicular to the earth's gravity and it uses a primary sensing element based on high aspect ratio microstructures, processed by air gap insulated micro structure (AIM) technology. A signal conditioning electronics, processing the MEMS signals, enables flexibility in terms of linearization, thermal compensation and signal calibration. Resolution of ±0.002° has been found around 0° together with a thermal zero drift lower than ±0.002°/°C from 0°C to +50°C. The overall system consumes 15 mA dc current from a 5V supply. Examples of application fields include: platform stabilization, drill orientation, event detection and telematics/GPS. © 2010 Springer Science+Business Media B.V.
CITATION STYLE
Crescini, D., Baù, M., & Ferrari, V. (2010). MEMS tilt sensor with improved resolution and low thermal drift. In Lecture Notes in Electrical Engineering (Vol. 54 LNEE, pp. 225–228). https://doi.org/10.1007/978-90-481-3606-3_43
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