Temperature stable amorphous-TeO2/36° -46° Y-X LiTaO3 substrates for surface acoustic wave applications

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Abstract

This research investigated the temperature coefficient of delay (TCD) of the surface acoustic wave (SAW) on the amorphous TeO2/36° -46° Y-X LiTaO3 layered substrates. The TCD can reach zero when the thickness of amorphous TeO2 film is much less than that of conventional SiO2 film, which means SAW devices on such substrates can be fabricated easily. Theoretical calculation showed that they have a very high K2 around 8%, a pure transverse surface wave mode, and a zero TCD simultaneously. They are therefore very appealing for a wide range of SAW applications. © 2008 American Institute of Physics.

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Shang, X., Gong, X., Xiong, J., Zhang, D., & Cheng, J. (2008). Temperature stable amorphous-TeO2/36° -46° Y-X LiTaO3 substrates for surface acoustic wave applications. Applied Physics Letters, 92(23). https://doi.org/10.1063/1.2942381

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