Laser-based structuring of piezoceramics for mobile microrobots

Abstract

This paper describes the laser-based structuring of piezoceramic actuators used in a mobile microrobot. The actuator has to meet several requirements. Firstly, the achieved positioning accuracy of the mobile platform should be in the single nanometer range. This leads to the use of piezoelectric ceramics, which support this demand. Secondly, as the robot needs to have up to three degrees of freedom (DoF), a complex actuator design is necessary. Thirdly, a small size of the actuator is advantageous in terms of microrobotics. Conventional structuring especially in three dimensions is challenging, due to the refractory properties of piezoceramics and the danger of short circuits or overheating. The presented laser fabrication process uses an Nd-YAG laser and a developed algorithm to structure special actuators. The successful application in a mobile microrobot proves the concept. © Springer Science+Business Media B.V. 2009.