Abstract
This paper describes realization and characterization of SrTiO3 (STO) high K MIM capacitors above BiCMOS integrated circuit (IC). These capacitances are connected to IC and are used as coupling capacitors.
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CITATION STYLE
APA
Defaÿ, E., Wolozan, D., Garrec, P., André, B., Ulmer, L., Aïd, M., … Ancey, P. (2006). Above IC integrated SrTiO3 high K MIM capacitors. In ESSDERC 2006 - Proceedings of the 36th European Solid-State Device Research Conference (Vol. 2006-January, pp. 186–189). IEEE Computer Society. https://doi.org/10.1109/essder.2006.307669
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