Micro-lens array fabrication by two photon polymerization technology

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Abstract

This paper presents the design and fabrication of micro-lens arrays (MLAs) by Two Photon Polymerization (TPP) technology. First, a computer program is developed to construct a solid MLA model with a specified focal length and lens diameter. A TPP laser scanning path for MLA fabrication is then generated. MLAs are fabricated by TPP, with quality assessed by SEM. Finally, good quality 5 × 5 MLA squares with dimensions 108 × 108 are successfully manufactured. © 2013 International Journal of Automation and Smart Technology.

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Chung, T. T., Tu, Y. T., Hsueh, Y. H., Chen, S. Y., & Li, W. J. (2013). Micro-lens array fabrication by two photon polymerization technology. International Journal of Automation and Smart Technology, 3(2), 131–135. https://doi.org/10.5875/ausmt.v2i2.186

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