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Preparation of Silica / Alumina Composite Abrasives and Their CMP Behavior on Hard Disk Substrate

  • Chu F
  • Lei H
Springer Berlin Heidelberg, (2009), 633-635
DOI: 10.1007/978-3-642-03653-8_206
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Chu, F., & Lei, H. (2009). Preparation of Silica / Alumina Composite Abrasives and Their CMP Behavior on Hard Disk Substrate. In Advanced Tribology (pp. 633–635). Springer Berlin Heidelberg. https://doi.org/10.1007/978-3-642-03653-8_206

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