A superhydrophobic chip based on SU-8 photoresist pillars suspended on a silicon nitride membrane

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Abstract

We developed a new generation of superhydrophobic chips optimized for probing ultrasmall sample quantities by X-ray scattering and fluorescence techniques. The chips are based on thin Si3N4 membranes with a tailored pattern of SU-8 photoresist pillars. Indeed, aqueous solution droplets can be evaporated and concentrated at predefined positions using a non-periodic pillar pattern. We demonstrated quantitatively the deposition and aggregation of gold glyconanoparticles from the evaporation of a nanomolar droplet in a small spot by raster X-ray nanofluorescence. Further, raster nanocrystallography of biological objects such as rod-like tobacco mosaic virus nanoparticles reveals crystalline macro-domain formation composed of highly oriented nanorods. © 2014 the Partner Organisations.

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Marinaro, G., Accardo, A., De Angelis, F., Dane, T., Weinhausen, B., Burghammer, M., & Riekel, C. (2014). A superhydrophobic chip based on SU-8 photoresist pillars suspended on a silicon nitride membrane. Lab on a Chip, 14(19), 3705–3709. https://doi.org/10.1039/c4lc00750f

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