Subsurface Defects in Silicon Investigated by Modulated Optical Reflectance Measurements

Bailey, J., Weber, E., & Opsal, J. (1989). Subsurface Defects in Silicon Investigated by Modulated Optical Reflectance Measurements. In Review of Progress in Quantitative Nondestructive Evaluation (pp. 1263–1271). Springer US. https://doi.org/10.1007/978-1-4613-0817-1_158