Deposition and optimization of zinc oxide thin film using its nano-colloidal solution for various sensing applications

Abstract

This paper reports the morphology, electrical and optical characterizations of zinc oxide (ZnO) thin films deposited using its nano-colloidal solution by sol-gel technique for various applications such as Acoustic Sensor, FBAR and Gas Acoustic Sensor. The morphological study of deposited film was investigated using Atomic Force Microscopy (AFM). However, the electrical properties of deposited thin film were examined using I–V and C–V characteristics by making a capacitor on a silicon substrate. Also, the optical property such as photoluminescence (PL) of deposited film was measured.