Ultrafast Laser Micro- and Nanostructuring

Abstract

Near-threshold non-linear nanoscale processing phenomena generated by sub-100fs laser pulses are reviewed. Coupled with high NA focusing optics, high power oscillators demonstrated a high-repetition rate approach for the precise laser machining of dielectrics on a submicrometer scale. A new field of nanostructuring proposed on the basis of apertureless scanning near-field optical nanomachining and examples of femtosecond nanosurgery are discussed.