Ferroelectric properties of direct-patternable la substituted Bi 4Ti3O12 thin films formed by photochemical metal-organic deposition

Abstract

The surface microstructure and ferroelectric properties of direct-patternable Bi4-xLaxTi3O12 (BLT) films prepared by photochemical metal-organic deposition as a function of La contents were characterized. The surface microstructure showed that La substitution (x = 0.75 and 1.00) to Bi4Ti3O12 films was effective to induce an improved microstructure of the BLT films without the formation of surface holes. The measured remnant polarization values of BLT films with x = 0, 0.25, 0.50, 0.75, and 1.00 were 3.7, 7.1, 11.3, 16.0, and 8.1 μC/cm2, respectively. After 109 cycles, the remaining remnant polarizations of Bi4-xLaxTi 3O12 films with x = 0, 0.25, 0.50, 0.75, and 1.00 were 64.9, 69.5, 75.9, 94.8, and 95.0%, respectively. Considering the surface microstructure and ferroelectric properties of the BLT films, the BLT film with x = 0.75 showed the best microstructure and ferroelectric properties among all the BLT films. These results suggest the possible application of ferroelectric BLT film, relatively easily and without high cost process such as dry etching. © 2009 The Ceramic Society of Japan. All rights reserved.