Utilization of 2:1 internal resonance in microsystems

Abstract

In this paper, the nonlinear mode coupling at 2:1 internal resonance has been studied both analytically and experimentally. A modified micro T-beam structure is proposed, and the equations of motion are developed using Lagrange's energy method. A two-variable expansion perturbation method is used to describe the nonlinear behavior of the system. It is shown that in a microresonator with 2:1 internal resonance, the low-frequency mode is autoparametrically excited after the excitation amplitude reaches a certain threshold. The effect of damping on the performance of the system is also investigated.