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Book Chapter

Micromachined Gas Inertial Sensors

  • Zhu R
DOI: 10.1007/978-981-10-5945-2_11
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Zhu, R. (2018). Micromachined Gas Inertial Sensors (pp. 517–538). https://doi.org/10.1007/978-981-10-5945-2_11

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