Abstract
In this chapter we will present a step-by-step procedure that one would use to deposit parylene using a typical deposition system. The steps for your deposition will most likely deviate from these but they are not meant to be followed exactly but more to give the general understanding of the process of parylene deposition.
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CITATION STYLE
APA
Fortin, J. B., & Lu, T.-M. (2004). Step-by-Step Guide to Depositing Parylene. In Chemical Vapor Deposition Polymerization (pp. 23–26). Springer US. https://doi.org/10.1007/978-1-4757-3901-5_3
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