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Low-Temperature Polymer Bonding Using Surface Hydrophilic Treatment for Chemical/Bio Microchips

  • Shinohara H
  • Mizuno J
  • Shoji S
InTech, (2010)
DOI: 10.5772/6892
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Abstract

In this chapter, two low-temperature bonding technologies are described. Section 2 introduces low-temperature direct bonding methods of poly (methyl methacrylate) (PMMA) or cyclo-olefin polymer (COP), and their applications of microchannel devices. Section 3 describes surface hydrophilic treatment method using aromatic polyurea film, and bonding method using the polyurea film.

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APA

Shinohara, H., Mizuno, J., & Shoji, S. (2010). Low-Temperature Polymer Bonding Using Surface Hydrophilic Treatment for Chemical/Bio Microchips. In Solid State Circuits Technologies. InTech. https://doi.org/10.5772/6892

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