An Integrated Combustor-Thermoelectric Micro Power Generator

Abstract

This paper reports a micromachined thermoelectric (TE) power generator based on catalytic combustion in a micromachined combustion chamber. The 2mm8mm0.5mm combustion chamber is covered by a dielectric diaphragm supported on a silicon substrate that is bonded to a glass substrate. The generator integrates polysilicon-Pt thermopiles on the diaphragm to take advantage of high combustion temperature as well as excellent thermal isolation of the diaphragm. Combustion of hydrogen and air mixture is self-sustained inside the combustor after ignition and output power level of ∼1W/thermocouple has been obtained. Temperature measurements indicate that power level of 10W/thermocouple could be achieved by slight geometric modification to fully exploit the high temperature gradient of combustion on diaphragm.