Direct printing of silver nano-particles based ink on polydimethylsiloxane (PDMS) for mems devices

Abstract

We introduce the use of inkjet printing techniques for rapid fabrication of conductive silver microelectrodes on polydimethylsiloxane (PDMS). An extensive experimental characterization study on the effect of printing parameters on the electrode quality is presented here. We also demonstrate the utility of the microelectrode-printing technique by making quadruple electrodes and using for dielectrophoretic (DEP) manipulation of polystyrene microbeads.