Creating structures—Micromachining

Abstract

We have explored the nature of the silicon substrate, seen how to tailor its composition by doping it, how to deposit thin film layers, and also how to create and transfer patterns using photolithography. We next turn our attention to using the substrate, thin film deposition, and pattern transfer processes to create the actual structures that make up a MEMS device. This shaping of materials into structural elements is commonly known as micromachining.