A micro resonant charge sensor with enhanced sensitivity based on differential sensing scheme and leverage mechanisms

Abstract

This letter reports a micro-electro-mechanical systems (MEMS) resonant charge sensor with enhanced sensitivity based on differential sensing scheme and leverage mechanisms. The sensor comprises two symmetrically-distributed double-ended tuning fork (DETF) resonators, each of which connects with dual micro-leverage mechanisms. The micro-leverages amplify electrostatic force in opposite directions and cause differential frequency shift of the two resonators. Both the resonators show a similar trend in behaviors of electrical and mechanical nonlinearity. Effect of environment disturbance is suppressed by the differential sensing scheme. The measured sensitivity of the two resonators are 3.31×10-4 Hz/fC2 and 1.85×10-4 Hz/fC2 respectively, and an overall sensitivity for the resonant charge sensor is 5.16×10-4 Hz/fC2.