Sensitivity analysis of MEMS based piezoresistive sensor using COMSOL multiphysics

Abstract

The present paper peruses MEMS based piezoresistive pressure sensor and its fabrication techniques. Simulation of the pressure sensor is done by using COMSOL Multiphysics software for P-type silicon piezoresistor. The deflection of N-type silicon diaphragm depends upon the Young’s modulus of the material and varies with the amount of force applied to the diaphragm. The simulation result emphasizes that an appropriate selection of the piezoresistive material and the amount of force applied on the diaphragm impacts the sensor sensitivity levels upon low power consumption.