MEMS Accelerometers: Testing and Practical Approach for Smart Sensing and Machinery Diagnostics

Abstract

Micro-Electro Mechanical Systems (MEMS)-based sensing elements are gaining wider acceptance and adoption for static and dynamic (mobile) applications. Recent increase in demands for reliable wireless sensing nodes has necessitated seeking alternatives to expensive conventional accelerometers to perform multicontrol and monitoring tasks. Owed to their size and cost, MEMS accelerometers is one of the alternative options. This chapter provides insight into the fundamental design, working principles and practical guidance to MEMS accelerometers. Details of experimental set-ups, signal conditioning and data processing are also provided to construct integrated performance assessment system. Performance assessments are carried out using sinusoidal excitations, impulsive (hummer testing) and random excitations. Subsequently, calculations and comments on frequency response functions, signalto- noise ratios and phase distortions are outlined. Finally, guidelines to practical adoption of MEMS accelerometers such as packaging, establishing smart vibration sensing nodes and extraction of condition-related information are given