3D Fabrication of Embedded Microcomponents

Abstract

Multiphoton absorption in transparent materials irradiated by a femtosecond (fs) laser can be used for three-dimensional (3D) microstructuring inside the materials. This technique has been widely applied to produce optical microcomponents and microfluidics embedded in glass. In this chapter, the principles of internal modification and fabrication by the laser are introduced, and state-of-the-art techniques are reviewed for applications in 3D photonics devices and integrated microchips for biochemical analysis and medical inspection.