Abstract
This paper explores the limits of micromachined displacement pumps for vacuum generation. We studied a single stage pump which has a theoretical vacuum level of 406 torr (limited by dead volume), but which experimentally achieves a base pressure of 494 torr. Careful characterization has enabled us to quantitatively understand and measure the various effects that limit the performance for this class of pumps. In particularly, we have measured valve leakage under vacuum operation, and correlated this to valve design parameters such as seal ring width.
Cite
CITATION STYLE
Zhou, H., Sharma, V., Li, H. Q., & Schmidt, M. A. (2010). A study of micromachined displacement pumps for vacuum generation. In Technical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop (pp. 392–395). Transducer Research Foundation. https://doi.org/10.31438/trf.hh2010.107
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