Nondispersive infrared gas sensor using InSb-based photovoltaic-type infrared sensor

Abstract

We have developed an uncooled InSb-based infrared sensor with small features, high sensitivity, fast response, and spectral response ranging from 2 to 7 μm. A miniaturized nondispersive infrared (NDIR) gas sensor module was also implemented and tested. Gas concentration measurements were performed, showing mat the sensor can detect several gases, such as CO2, CO, and NOX, which have absorption peaks at die wavelength response range of the detector. In this work, a fully digital CO2 meter was implemented, showing that our detector allows fast response measurements implementable in small modules.