(001)-orientation of anatase TiO2 thin films on RbLaNb 2O7 seed layer prepared by ELAMOD

Abstract

By means of a metal-organic deposition process, the anatase TiO2 thin films with and without (010)-oriented RbLaNb2O7 seed layer prepared by an excimer laser assisted metal-organic deposition process were crystallized on silica glass substrates. The anatase TiO2 thin film on the substrate with the seed layer showed high (001)-orientation because of the small lattice mismatch between the (001)-TiO2 and (010)-RbLaNb2O7 planes, while the anatase TiO2 thin film without the seed layer was crystallized without any specific orientations. The Lotgering factor F(001) of the obtained (001)-oriented anatase TiO2 thin film was evaluated to be about 0.92. The (001)-orientation degree seems to be further improved by some surface modifications of the seed layer to stimulate the chemical bonding for the edge shared TiO6 octahedra along the c-axis. © 2011 Ceramic Society of Japan.