Wet Etching

Abstract

Wet etching is a popular process in the mass production for electronic devices, especially in the display and integrated circuit industry. The major techniques of wet etching are described in this chapter. It begins with a technical overview and discussion of the applications of wet etching in flat panel display fabrication. The chapter explains the principles of wet etching in terms of etching mechanisms, materials processing, and other critical factors. In the applications, some special requests are involved in the etching process. Moreover, the process requirements such as tools, etchants, special considerations, and control factors are also explained. The chapter concludes with a discussion on the future development of wet etching.