A systematic study of Gold catalyzed growth of Ge nanoneedles by PECVD at low temperatures (<4000 C) is presented. Morphology, growth rate and aspect ratio of the needles are studied as a function of power, gas flow rate and chamber pressure. Nanoneedles were grown at pre-defined positions with catalytic particles obtained by e-Beam Lithography and lift off. This opens up the possibility of using Ge Nano needles in photovoltaic, nanoelectronics and nanosensor device applications.
CITATION STYLE
Kallatt, S., Nair, S., Vijayaraghavan, M. N., & Bhat, N. (2014). Gold Catalyzed Plasma Assisted Growth of Germanium Nanoneedles. In Environmental Science and Engineering (pp. 713–716). Springer Science and Business Media Deutschland GmbH. https://doi.org/10.1007/978-3-319-03002-9_184
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