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The Use of Surface Tension for the Design of MEMS Actuators

  • Kim C
Springer US, (2003), 239-246
DOI: 10.1007/978-1-4615-1023-9_19
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Kim, C.-J. (2003). The Use of Surface Tension for the Design of MEMS Actuators. In Nanotribology (pp. 239–246). Springer US. https://doi.org/10.1007/978-1-4615-1023-9_19

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