Abstract
A novel method is presented for two-dimensional (2-D) in-plane displacement measurement that is based on the heterodyne interferometry. The method can effectively reduce the the environmental disturbance and allow the measurement of high stability and low uncertainty. According to the experiment results, the subnanometer resolution can be ensured within 250 μm measuring range. The in-plane displacement measurement is also accomplished.
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CITATION STYLE
Wu, C. C., Hsu, C. C., Lee, J. Y., Chen, H. Y., & Weng, H. F. (2007). In-plane displacement measurement with subnanometer resolution for precision manufacture platform. In Proceedings of the 35th International MATADOR 2007 Conference (pp. 253–256). Springer Science and Business Media, LLC. https://doi.org/10.1007/978-1-84628-988-0_57
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