Pvdf polymer-based mems cantilever for energy harvesting

Abstract

The ambient vibration-based MEMS cantilever is developing nowadays in terms of energy harvesting. Conventionally, battery is used as power supply for wireless devices and it should be periodically charged, which is difficult for devices in remote. MEMS cantilever-based energy harvesting is one of the solutions to this problem. The MEMS cantilever made of piezoelectric material will convert the environmental vibration into electrical energy. The structure and the material of the cantilever play a major role in producing the electric potential. In this paper, the T-shaped cantilever with PVDF is proposed and compared with the conventional structure and materials. The designed structure is simulated using COMSOL Multiphysics software and the virtual fabrication is done using the IntelliSUITE software.