Implementation of soft X-ray microscopy with several tens nanometers spatial resolution at NSRL

Abstract

A transmission soft X-ray microscope (TXM), which is similar to the full-field X-ray microscopes installed on other synchrotron radiation sources in the world, was developed at National Synchrotron Radiation Laboratory (NSRL) in Hefei. An X-ray image taken with the microscope was acquired and its spatial resolution was estimated to be better than 70nm. © 2009 IOP Publishing Ltd.