From simulation to manufacturing of piezoelectric micromachined AlN membrane

Abstract

The ongoing race in microelectronics results in increasing complexity of micro-electro-mechanical systems (MEMS) being developed. Recently, a growing interest is observed in piezoelectric layers and their application in MEMS transducers and sensors. Piezoelectric transducers move due to voltage excitation and usually have simple mechanical structure, with a sandwich of layers among which a piezoelectric layer occurs. In this work a step forward has been made in the manufacturing process of AlN at ITE (Institute of Electron Technology) as well as in manufacturing of simple sensors with piezoelectric materials. Authors describe technological tests for fabricated layers, simulation results together with electrical and mechanical tests results for chosen structure.