Formation of porous Ge using HF-based electrolytes

Abstract

We have performed an extensive study of the porosification of germanium by anodization in HF-based electrolytes. Both n- and p-doped Ge substrates (with varying doping levels) were used, as well as different electrolyte concentrations, anodization currents and times. We will review the conclusions we were able to draw from this series of experiments. © 2005 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.