Monte Carlo Method for Quantitative Analysis of Bulk and Layered Samples

Abstract

The present article describes a Monte Carlo method for routine quantitative microanalyses of bulk and stratified samples. The model is based only on elemental processes without experimental adjustments. Our approach is tested on data sets of bulk borides and carbides as well as on prepared layers of Au on Pt and Au on Si, where k-ratios were measured. Results point out that the proposed model is able to give results comparable to those obtained by empirical or semi-empirical approaches.