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Estimation of Greenhouse Gas Emissions in Micro-fabrication of MEMS Devices

  • Tanimura N
  • Sato T
  • Sato T
  • et al.
Springer Netherlands, (2012), 874-876
DOI: 10.1007/978-94-007-3010-6_178
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Tanimura, N., Sato, T., Sato, T., Nitta, H., Asaumi, K., Sato, A., … Maeda, R. (2012). Estimation of Greenhouse Gas Emissions in Micro-fabrication of MEMS Devices. In Design for Innovative Value Towards a Sustainable Society (pp. 874–876). Springer Netherlands. https://doi.org/10.1007/978-94-007-3010-6_178

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