Micro Flows: Fundamentals and Simulation

Abstract

1. Basic Concepts and Technologies. 1.1. New Flow Regimes in MEMS. 1.2. The Continuum Hypothesis. 1.3. The Pioneers. 1.4. Full-System Simulation of MEMS. 1.5. Modeling of Micro Flows -- 2. Governing Equations and Slip Models. 2.1. The Basic Equations of Fluid Dynamics. 2.2. Compressible Flow. 2.3. High-Order Models -- 3. Shear-Driven and Separated Micro Flows. 3.1. Couette Flow. 3.2. Cavity Flow. 3.3. Grooved Channel Flow. 3.4. Separated Internal Flows. 3.5. Separated External Flows -- 4. Pressure-Driven Micro Flows: Slip Flow Regime. 4.1. Isothermal Compressible Flows. 4.2. Adiabatic Compressible Flows -- Fanno Theory. 4.3. Inlet Flows. 4.4. Validation of Slip Models with DSMC. 4.5. Effects of Roughness -- 5. Pressure-Driven Micro Flows: Transition and Free-Molecular Regimes. 5.1. Transition and Free-Molecular Flow Regimes. 5.2. Burnett Equations in Micro Channels. 5.3. A Unified Flow Model -- 6. Thermal Effects in Micro Scales. 6.1. Thermal Creep (Transpiration). 6.2. Heat Transfer in Micro Poiseuille Flows. 6.3. Heat Transfer in Micro Couette Flows -- 7. Prototype Applications of Gas Micro Flows. 7.1. Gas Damping and Dynamic Response of MEMS. 7.2. Micro Propulsion and Micro Nozzle Flows -- 8. Electrokinetically Driven Liquid Micro Flows. 8.1. Electrokinetic Effects -- Review. 8.2. The Electric Double Layer. 8.3. Near-Wall Potential Distribution. 8.4. Governing Equations for Electroosmotic Flows. 8.5. Electrokinetic Micro Channel Flows. 8.6. EDL/Bulk Flow Interface Velocity Matching Condition. 8.7. Electroosmotic Slip Condition. 8.8. Complex Geometry Flows. 8.9. Dielectrophoresis -- 9. Numerical Methods for Continuum Simulation. 9.1. A High-Order Numerical Method: The [mu]Flow Code. 9.2. A Meshless Numerical Method. 9.3. The Force Coupling Method for Particulate Micro Flows -- 10. Numerical Methods for Atomistic Simulation. 10.1. Molecular Dynamics (MD) Method. 10.2. Direct Simulation Monte Carlo (DSMC) Method. 10.3. The Boltzmann Equation. 10.4. Lattice-Boltzmann Method (LBM).