Investigation of a scale-up manufacturing approach for nanostructures by using a nanoscale multi-tip diamond tool

Abstract

Increasing interest in commercializing functional nanostructured devices heightens the need for cost-effective manufacturing approaches for nanostructures. This paper presents an investigation of a scale-up manufacturing approach for nanostructures through diamond turning using a nanoscale multi-tip diamond tool (four tip tool with tip width of 150 nm) fabricated by focused ion beam (FIB). The manufacturing capacity of this new technique is evaluated through a series of cutting trials on copper substrates under different cutting conditions (depth of cut 100–500 nm, spindle speed 12–120 rpm). The machined surface roughness and nanostructure patterns are measured by using a white light interferometer and a scanning electron microscope, respectively. Results show that the form accuracy and integrity of the machined nanostructures were degraded with the increase of the depth of cut and the cutting speed. The burr and the structure damage are two major machining defects. High precision nano-grooves (form error of bottom width < 6.7 %) was achieved when a small depth of cut of 100 nm was used (spindle speed = 12 rpm). Initial tool wear was found at both the clearance cutting edge and the side edges of tool tips after a cutting distance of 2.5 km. Moreover, the nanometric cutting process was emulated by molecular dynamic (MD) simulations. The research findings obtained from MD simulation reveal the underlying mechanism for machining defects and the initialization of tool wear observed in experiments.