Silicon, Parylene, and Silicon/Parylene Micro-Needles for Strength and Toughness

Abstract

Strength and toughness are the primary issues in the development of micro-needles. To this end, two new processes have been developed that are capable of fabricating silicon needles, silicon and parylene laminated needles, parylene needles, and parylene needles with silicon tips. The fabricated silicon needles are strong enough to withstand bending moments up to 1.56 mNm, and, with a Parylene coating, they will not fail catastrophically. In addition, Parylene and silicon/ Parylene hybrid needles can undergo 1800 rotations without fracturing.