Heating rate and electrode charging measurements in a scalable, microfabricated, surface-electrode ion trap

Abstract

We characterise the performance of a surfaceelectrode ion "chip" trap fabricated using established semiconductor integrated circuit and micro-electro-mechanicalsystem (MEMS) microfabrication processes, which are in principle scalable to much larger ion trap arrays, as proposed for implementing ion trap quantum information processing. We measure rf ion micromotion parallel and perpendicular to the plane of the trap electrodes, and find that on-package capacitors reduce this to