Scanning probe microscopy

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Abstract

Scanning Probe Microscopy brings up to date a constantly growing knowledge base of electrical and electromechanical characterization at the nanoscale. This comprehensive, two-volume set presents practical and theoretical issues of advanced scanning probe microscopy (SPM) techniques ranging from fundamental physical studies to device characterization, failure analysis, and nanofabrication. Volume 1 focuses on the technical aspects of SPM methods ranging from scanning tunneling potentiometry to electrochemical SPM, and addresses the fundamental physical phenomena underlying the SPM imaging mechanism. Volume 2 concentrates on the practical aspects of SPM characterization of a wide range of materials, including semiconductors, ferroelectrics, dielectrics, polymers, carbon nanotubes, and biomolecules, as well as on SPM-based approaches to nanofabrication and nanolithography. © 2007 Springer Science+Business Media, LLC All rights reserved.

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Kalinin, S., & Gruverman, A. (2007). Scanning probe microscopy. Scanning Probe Microscopy (Vol. 2, pp. 1–980). Springer New York. https://doi.org/10.1007/978-0-387-28668-6

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