Fabrication of three-dimensional microstructures using standard ultraviolet and electron-beam lithography

  • Galas J
  • Belier B
  • Aassime A
  • et al.
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Abstract

We have designed and fabricated shape-controlled three-dimensional structures combining electron- beam and ultraviolet (UV) lithography. Starting with a tiff file format, a gray scale pattern using a high energy beam sensitive mask is produced with electron-beam direct writing. In only a one step UV exposure, an optical lens and a photonic band gap structure in 16.5 μm thick AZ 4562 positive photoresist, with controlled profile and smooth resist surface, were fabricated. A three-dimensional grid structure was also transferred to a 100 μm thick SU-8 negative photoresist.

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Galas, J. C., Belier, B., Aassime, A., Palomo, J., Bouville, D., & Aubert, J. (2004). Fabrication of three-dimensional microstructures using standard ultraviolet and electron-beam lithography. Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena, 22(3), 1160–1162. https://doi.org/10.1116/1.1755213

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