Design and development of MEMS pressure sensor characterization setup with low interfacing noise by using NI-PXI system

Abstract

In this paper, we present a self-contained automated MEMS pressure sensor testing system. The system is controlled by LabVIEW software, with a custom-designed menu-driven user interface in the OPEN-WIN window environment. It is capable of performing multi-parameter measurements including linearity, hysteresis, sensitivity and operating temperature. The built-in software package allows the user to perform statistical analysis with image capability. This system is applicable for device research, where, the “statistical” testing data provides the reliable experimental information and device mass production, where the interfacing noise free testing data and the generated graph can help in product sorting, quality control, and further processing. Fabrication and packaging issues of MEMS pressure sensor are also discussed in terms of device performance.