Vapor deposition routes to conformal polymer thin films

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Abstract

Vapor phase syntheses, including parylene chemical vapor deposition (CVD) and initiated CVD, enable the deposition of conformal polymer thin films to benefit a diverse array of applications. This short review for nanotechnologists, including those new to vapor deposition methods, covers the basic theory in designing a conformal polymer film vapor deposition, sample preparation and imaging techniques to assess film conformality, and several applications that have benefited from vapor deposited, conformal polymer thin films.

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APA

Moni, P., Al-Obeidi, A., & Gleason, K. K. (2017, March 28). Vapor deposition routes to conformal polymer thin films. Beilstein Journal of Nanotechnology. Beilstein-Institut Zur Forderung der Chemischen Wissenschaften. https://doi.org/10.3762/bjnano.8.76

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