THERMAL DESORPTION SPECTRA STUDY OF HYDROGEN CHEMISORPTION ON Si(100) CLEAN SURFACE.

Abstract

Two desorption peaks corresponding to monohydride and dihydride phases on Si(100) surface have been found in the thermal desorption measurement. The experimental activation energies of desorption for these two peaks are 53 and 15 kcal/mole, respectively, which are close to the calculated desorption energies reported by Verwoerd. This implies that both phases are desorbed in the form of molecules. But the order plot shows that the desorption kinetics of monohydride phase is a first order process.