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Plasma-Polymerized Fluoropolymer Thin Films for Microelectronic Applications

  • Silverstein M
  • Chen R
  • Sacher E
  • et al.
Springer US, (2002), 61-71
DOI: 10.1007/978-1-4615-0563-1_7
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Silverstein, M. S., Chen, R., Sacher, E., & Sandrin, L. (2002). Plasma-Polymerized Fluoropolymer Thin Films for Microelectronic Applications. In Metallization of Polymers 2 (pp. 61–71). Springer US. https://doi.org/10.1007/978-1-4615-0563-1_7

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