Depth profiles of nitrogen and chlorine in pure materials through AMS of the neutron activation products 14C and 36Cl

Abstract

Determination of the more common light elements such as nitrogen and chlorine at trace levels is difficult because of their high abundance on sample surfaces, in materials used to build analysis instruments, and in the residual gas of the instrument vacuum. We present here a new approach to analysis of these elements: accelerator mass spectrometry (AMS) combined with neutron activation. These are the first results of this new method: depth profiles of nitrogen and chlorine implanted in semiconductor grade silicon. -from Authors