LCD processing and testing

Abstract

The TFT-LCD technology is based upon semiconductor IC fabrication processing. The unique point of the TFT-LCD technology is that it uses a glass substrate, instead of the conventional Si wafer. For the TFT fabrication process, thin-film formation, such as CVD, sputtering, and film coating on glass substrate are important. In the assembling process of color filter and TFT substrate, photo spacer and ODF have been developed and applied for large-size LCDs. Light source of backlight is being replaced from CCFL by LED. Test and repair technologies have been essential technologies for stable production. As described in this chapter, these technologies are contributing to realize good yield for large-size display fabrication.