Measurements of the contact angle of Noa81 photoresist for different temperatures

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Abstract

In this work we study the properties of the surface, obtained by applying Noa 81 photoresist at different temperatures of the substrate. The measurement of free energy was conducted by the Owens, Wendt, Rabel and Kaelble method under isothermal conditions. The paper presents the obtained data on contact angle for different temperatures.

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APA

Kirichenko, E. O., & Gatapova, E. Y. (2016). Measurements of the contact angle of Noa81 photoresist for different temperatures. In MATEC Web of Conferences (Vol. 92). EDP Sciences. https://doi.org/10.1051/matecconf/20179201042

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