Self-organized growth by sputtering and other PVD techniques

Abstract

This paper presents a brief review on known self-organized growth by deposition and reports on a new approach of self-organized growth of micro- and nanostructures that can be realized by modified magnetron sputtering. Since self-organization phenomena are multidisciplinary, general ideas on self-organization and related concepts are considered first. Then, known methods of porous structure fabrication in contrast to solid layers and established self-organized growth types are discussed with an emphasis on using PVD techniques. Finally, new steps in plasma-assisted self-organized growth under quasi-equilibrium conditions are presented.