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Fabrication of Oxide Nanoparticles by Ion Implantation and Thermal Oxidation

  • Amekura H
  • Kishimoto N
Springer US, (2009), 1-75
DOI: 10.1007/978-0-387-77717-7_1
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Abstract

Fabrication of oxide nanoparticles (NPs) in transparent insulators by metal ion implantation and subsequent thermal oxidation (II&TO) is reviewed. After a short historical review of the II&TO method, fundamental issues concerning two important processes in...

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Amekura, H., & Kishimoto, N. (2009). Fabrication of Oxide Nanoparticles by Ion Implantation and Thermal Oxidation. In Toward Functional Nanomaterials (pp. 1–75). Springer US. https://doi.org/10.1007/978-0-387-77717-7_1

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